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The Fluororesin Needle Valve is a precision flow control device designed specifically for use in semiconductor manufacturing processes where precise liquid flow rate adjustment is critical. It enables accurate regulation of fluid delivery in sensitive environments, ensuring consistent performance and process reliability under demanding conditions.
The valve's main resin components are constructed from PFA, PTFE, or PVDF. These materials provide excellent chemical resistance and heat resistance, with PFA and PTFE offering superior thermal stability and PVD offering strong mechanical integrity. No copper-based metallic material is used in the flow path to prevent contamination and ensure compatibility with high-purity process fluids.
The valve features a sealed interface designed for direct connection to liquid systems. The configuration includes a needle-type actuator that allows fine-tuned adjustment of flow, while the sealing system uses HNBR or FKM rubber materials specifically selected for low-concentration ozone environments. This ensures reliable performance in oxidizing or reactive process atmospheres.
The Fluororesin Needle Valve is rated for a maximum operating pressure of 0.7MPa at temperatures between 0 and 60℃, with an overall operating temperature range of 0 to 100℃. It is suitable for liquid media under standard process conditions and maintains performance stability across the specified thermal range.
The product is available in standard configurations designed for cleanroom applications. All variants are offered without color options or custom finishes, focusing on functional integrity. The valve is provided with non-grease, oil-free assembly specifications to ensure compatibility with high-purity fluid systems and avoid contamination risks.
Installation requires direct integration into liquid flow lines using standard threaded or flanged connections as specified in the product design. The valve supports clean-room packaging with fluorine grease application and vacuum ultrasonic cleaning using HFE, followed by deaeration packaging to maintain a contamination-free environment during handling and storage.
| Specification | Details |
|---|---|
| Fluid medium | Liquid (Conditional*1) |
| Max. operating pressure | 0.7MPa (at 0 to 60℃)*2 |
| Operating temperature range | 0 to 100℃ |
| Material restriction | No copper-based metallic material is used in flow paths |
| Oil-free specification | Non-grease oil-free specifications No lubrication is used during assembly |
| Clean-room specification | Clean-room package specification Fluorine grease is used as grease, and the product is packaged in a clean room after cleaning with clean air |
| Clean-wash specification | Clean-wash specification After vacuum ultrasonic cleaning with HFE (hydro fluoro ether) in a clean room, deaeration packaging is performed |
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