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The External Vacuum Controller VIP is a precision vacuum control device designed for semiconductor-related equipment such as chip mounters, handlers, and small workpiece transfer systems. It features an industry-first built-in flow sensor that enables real-time detection of whether a small workpiece has been successfully picked up, enhancing process reliability and reducing errors in automated handling operations.
Constructed with robust industrial materials, the controller is engineered for durability and performance under demanding environments. The body is ultra-small in size yet capable of delivering high vacuum switchover performance. It uses a diffused semiconductor pressure sensor for pressure detection and is compliant with JIS B 8392-1: Class 1.2.1 to 2.4.3 standards for air and vacuum applications.
The controller offers flexible connection options, supporting both direct and indirect operation via pilot valve. It can be configured as a blow-off air rate adjusting type with a needle or as a cost-effective fixed flow rate type, allowing users to select the most suitable option based on their process requirements. Vacuum supply is compatible with standard vacuum lines operating within the specified pressure range.
The VIP operates reliably across a wide range of conditions: it functions within an operating pressure range of 0.3 to 0.7 MPa (equivalent to -90 kPa to 0.2 MPa), and a vacuum range from -90 to 0 kPa. It is rated for ambient temperatures between 5°C and 50°C, with no freezing risk, and operates in humidity levels from 35% to 85% RH without dew condensation. At vacuum supply pressure of -80 kPa, it delivers a minimum air rate of 10 L/min [ANR], with performance exceeding 9.5 L/min [ANR] at 0.5 MPa air supply.
The product is available in a single configuration with no color or variant options specified. The design emphasizes compactness, making it ideal for integration into space-constrained equipment. All technical specifications are consistent across the model line, ensuring compatibility and ease of use in standard semiconductor handling systems.
Installation requires connection to vacuum supply lines and air supply circuits. The controller supports indirect operation via a pilot valve or direct operation, with vacuum circuit proof pressure rated at 0.3 MPa and air supply circuit proof pressure at 1.05 MPa. It is designed for integration into existing systems where precise vacuum switching and flow monitoring are required.
| Specification | Details |
|---|---|
| Fluid medium | Air (JIS B 8392-1: Class 1.2.1 to 2.4.3 compliant), Vacuum |
| Operating pressure range | 0.3 to 0.7 MPa | -90 kPa to 0.2 MPa |
| Operating vacuum range | -90 to 0 kPa |
| Operating temp. range | 5 to 50 ℃ (No freezing) |
| Operating humidity range | 35 to 85% RH (No dew condensation) |
| Proof pressure (Air supply circuit) | 1.05 MPa |
| Proof pressure (Vacuum circuit) | 0.2 MPa |
| Rated voltage | 24 VDC ±10% | 10.8 to 30 VDC (Ripple voltage included) |
| Operation type | Indirect operation by pilot valve | Direct operation |
| Valve type | Normally closed |
| Vacuum supply air rate (*1, *2, *3) | 10 L/min [ANR] (at vacuum supply pressure -80 kPa) |
| Response time (OFF→ON) | 7 msec |
| Response time (ON→OFF) | 8.5 msec | 2.5 msec |
| Response time *4. (OFF→ON) | 3.5 msec |
| Current consumption | 20 mA | 30 mA max. (no-load) |
| Pressure detection method | Diffused semiconductor pressure sensor |
| Proof pressure | 1 MPa | 0.3 MPa |
| Analog output: Pressure detection range | -100 to 0 kPa |
| Analog output: Output voltage | 1 to 5 V |
| Analog output: Zero point voltage | 1 ±0.04 V |
| Analog output: Span voltage | 4 ±0.04 V |
| Analog output: Output current | 1 mA max. |
| Analog output: Temperature characteristics | ±2% F.S. max. (Reference temperature: 25 ℃) |
| Analog output: Linearity | ±0.5% F.S. max. |
| Analog output: Output impedance | 1 kΩ |
| Analog output | 1 to 5 V (non-linear characteristics, connected load impedance 50 kΩ min.) |
| Pressure characteristics | ±10% F.S. max. (Reference temperature: 25 ℃) |
| Temperature characteristics | ±0.6% F.S. max. (Reference temperature: 25 ℃) |
| Response time | 5 msec max. (Sensor alone) |
| Output impedance | 1 kΩ |
| Metric size (mm) | φ1.8, φ3, φ4 | φ4, φ6, φ8 |
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